Invention Grant
- Patent Title: Transport carrier docking device
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Application No.: US17657423Application Date: 2022-03-31
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Publication No.: US12327747B2Publication Date: 2025-06-10
- Inventor: Chih-Hung Huang , Cheng-Lung Wu , Yang-Ann Chu , Hsuan Lee , Jiun-Rong Pai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Harrity & Harrity, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A transport carrier docking device may be capable of forming an air-tight seal around a transport carrier while a front portion of the transport carrier is inserted into a chamber of the transport carrier docking device. Semiconductor wafers in the transport carrier may be accessed by a transport tool while the air-tight seal exists around the transport carrier, which prevents and/or reduces the likelihood that contaminants in a semiconductor fabrication facility will reach the semiconductor wafers. The air-tight seal around the transport carrier may reduce defects of the semiconductor wafers that might otherwise be caused by the contaminants, may increase manufacturing yield and quality in the semiconductor fabrication facility, and/or may permit the continued reduction in device and/or feature sizes of integrated circuits and/or semiconductor devices that are to be formed on semiconductor wafers.
Public/Granted literature
- US20220223449A1 TRANSPORT CARRIER DOCKING DEVICE Public/Granted day:2022-07-14
Information query
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