Invention Grant
- Patent Title: Semiconductor device, manufacturing method therefor, and electronic equipment
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Application No.: US18754367Application Date: 2024-06-26
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Publication No.: US12328861B2Publication Date: 2025-06-10
- Inventor: Xuezheng Ai , Xiangsheng Wang , Guilei Wang , Chao Zhao , Wenhua Gui
- Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
- Applicant Address: CN Beijing
- Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
- Current Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
- Current Assignee Address: CN Beijing
- Agency: BROOKS KUSHMAN P.C.
- Priority: CN202311065772.9 20230823
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L23/522 ; H01L23/528

Abstract:
A semiconductor device, manufacturing method therefor, and electronic equipment are provided. The manufacturing method includes: alternately depositing sacrificial layers and insulation layers to obtain a stacked structure; forming in the stacked structure a plurality of via holes distributed at intervals, and forming dummy word lines in the via holes; forming a first trench penetrating through the stacked structure every two via holes apart; forming a plurality of grooves by re-etching the plurality of insulation layers within the first trench, wherein two grooves of each insulation layer in two first trenches respectively expose partial side walls of a dummy word line; forming conductive layers within the two grooves corresponding to each insulation layer, wherein a conductive layer within each groove surrounds two exposed dummy word lines; and disconnecting a conductive layer surrounding a dummy word line to form a first electrode and a second electrode of a transistor.
Public/Granted literature
- US20250071968A1 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT Public/Granted day:2025-02-27
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