Invention Grant
- Patent Title: Electronic component having the dielectric film not covers a corner part of the lower electrode
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Application No.: US17784857Application Date: 2020-12-04
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Publication No.: US12334265B2Publication Date: 2025-06-17
- Inventor: Kazuhiro Yoshikawa , Kenichi Yoshida , Takashi Ohtsuka
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rimon P.C.
- Priority: JP2019-229654 20191219
- International Application: PCT/JP2020/045209 WO 20201204
- International Announcement: WO2021/124926 WO 20210624
- Main IPC: H01G4/30
- IPC: H01G4/30 ; H01G4/08 ; H01G4/224 ; H01G4/40

Abstract:
An electronic component includes: a conductive pattern provided on the main surface of a substrate and constituting a lower electrode; a dielectric film that covers top and side surfaces of the conductive pattern; and a conductive pattern stacked on the top surface of the conductive pattern through the dielectric film and constituting an upper electrode. A part of the dielectric film that is parallel to the main surface of the substrate is removed at least partly. Partially removing a part of the dielectric film that is parallel to the main surface of the substrate allows stress relaxation. This prevents peeling at the interface between the lower electrode and the dielectric film.
Public/Granted literature
- US20230005667A1 ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD Public/Granted day:2023-01-05
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