- Patent Title: Chamber body feedthrough for in chamber resistive heating element
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Application No.: US17579762Application Date: 2022-01-20
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Publication No.: US12334341B2Publication Date: 2025-06-17
- Inventor: Brian Hayes Burrows , Ala Moradian , Zuoming Zhu , Chia Cheng Chin
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C16/458 ; H01L21/67
Abstract:
A method and apparatus for providing uniform heating of substrates disposed within a processing chamber is provided. The apparatus includes one or more heating coils disposed in the processing chamber. The one or more heating coils are electrically coupled to a power source using heater rods. The heater rods are coupled to a socket on a distal end opposite the connection to the heating coils. The socket includes a feedthrough and a cooling plate configured to remove contaminants, such as methane, from the area surrounding the heater rod.
Public/Granted literature
- US20220254634A1 CHAMBER BODY FEEDTHROUGH FOR IN CHAMBER RESISTIVE HEATING ELEMENT Public/Granted day:2022-08-11
Information query
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