Optical semiconductor integrated element and method of manufacturing optical semiconductor integrated element
Abstract:
An optical semiconductor integrated element comprises a laser section and a photodetector section which are arranged on the same semiconductor substrate, the laser section and the photodetector section each have a light confining layer which confines light, a cladding layer, and a contact layer formed of an InGaAs layer or an InGaAsP layer, the light confining layer of the laser section is an active layer, the contact layer of the photodetector section is a light absorption layer, each cladding layer is a ridge structure having a shape in which a width at a side of the light confining layer is narrower than a width at a side of the contact layer in a cross-section which is perpendicular to the optical axis, and on a side surface of the light confining layer, the cladding layer and the contact layer, a semiconductor embedded layer is not provided.
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