Invention Grant
- Patent Title: Memory structure having air gap and method for manufacturing the same
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Application No.: US17707562Application Date: 2022-03-29
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Publication No.: US12336174B2Publication Date: 2025-06-17
- Inventor: Meng-Han Lin , Chia-En Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H01L23/48 ; H10B41/10 ; H10B43/10 ; H10B43/27 ; H10D62/10

Abstract:
A semiconductor device includes a substrate and a memory structure disposed over the substrate. The memory structure includes a pair of first conductive lines, a channel element disposed between the pair of the first conductive lines and formed with an air gap therein, a first memory element disposed to separate one of the pair of the first conductive lines from the channel element, and a second memory element disposed to separate the other one of the pair of the first conductive lines from the channel element. A method for manufacturing the semiconductor device is also disclosed.
Public/Granted literature
- US20230320084A1 MEMORY STRUCTURE HAVING AIR GAP AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2023-10-05
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