Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17408938Application Date: 2021-08-23
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Publication No.: US12336176B2Publication Date: 2025-06-17
- Inventor: Shigeru Kinoshita
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2021-040583 20210312
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H10B41/10 ; H10B41/27 ; H10B43/10 ; H10B43/27

Abstract:
A semiconductor memory device comprises: a first conductive and second conductive layers extending in a first direction; and first and second semiconductor column rows aligned in a second direction. The first semiconductor column rows each comprise first semiconductor columns aligned in the first direction and facing the first conductive layer. The second semiconductor column rows each comprise second semiconductor columns aligned in the first direction and facing the second conductive layer. For example, a distance in the first direction between center positions of two of the first semiconductor columns adjacent in the first direction is assumed to be a first adjacent distance. In this case, a pitch in the second direction of the first semiconductor column rows is √3/2 or more times the first adjacent distance. Moreover, a pitch in the second direction of the second semiconductor column rows is less than √3/2 times the first adjacent distance.
Public/Granted literature
- US20220293620A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-09-15
Information query
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