Invention Grant
- Patent Title: Thin-film transistor
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Application No.: US17289570Application Date: 2020-06-04
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Publication No.: US12336225B2Publication Date: 2025-06-17
- Inventor: Jung Bae Kim , Dong Kil Yim , Soo Young Choi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2020/036134 WO 20200604
- International Announcement: WO2020/247640 WO 20201210
- Main IPC: H10D30/67
- IPC: H10D30/67

Abstract:
Embodiments herein include thin-film transistors (TFTs) including channel layer stacks with layers having differing mobilities. The TFTs disclosed herein transport higher total current through both the low mobility and the high mobility channel layers due to higher carrier density in high mobility channel layer and/or the high mobility channel layers, which increases the speed of response of the TFTs. The TFTs further include a gate structure disposed over the channel layer stack. The gate structure includes one or more gate electrodes, and thus the TFTs are top-gate (TG), double-gate (DG), or bottom-gate (BG) TFTs. The channel layer stack includes a plurality of layers with differing mobilities. The layers with differing mobilities confer various benefits to the TFT. The high mobility layer increases the speed of response of the TFT.
Public/Granted literature
- US20220013670A1 THIN-FILM TRANSISTOR Public/Granted day:2022-01-13
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