Invention Grant
- Patent Title: Piezoluminescence structure, piezoelectric structure, manufacturing method thereof, and high sensitivity pressure sensor using the same
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Application No.: US17337301Application Date: 2021-06-02
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Publication No.: US12336435B2Publication Date: 2025-06-17
- Inventor: Hyung Ho Park , Kyung Mun Kang , Yue Wang , Min Jae Kim , Chabungbam Akendra Singh , Chan Lee
- Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR10-2020-0066654 20200602
- Main IPC: H01L41/187
- IPC: H01L41/187 ; C09K11/55 ; C23C16/455 ; H10N30/05 ; H10N30/076 ; H10N30/079 ; H10N30/30 ; H10N30/853

Abstract:
Provided are a piezoluminescence structure, a piezoelectric structure, a manufacturing method thereof, and a high-sensitivity pressure sensor using the same. The piezoelectric structure includes: a plurality of perovskite material layers each including a material having an AnBnO3n perovskite structure; and interlayers inserted between the plurality of perovskite material layers and including A*O which is a metal oxide having reaction resistance to CO2. Here, A and A* are different elements and are one of an alkaline earth metal element, an alkali metal element, a lanthanide element, and a post-transition metal element, B is a transition metal element, O is an oxygen element, and n is a positive (+) integer. The piezoelectric structure may be a piezoluminescence structure.
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