Invention Grant
- Patent Title: Ring carrier and substrate treating system
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Application No.: US17744852Application Date: 2022-05-16
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Publication No.: US12340988B2Publication Date: 2025-06-24
- Inventor: Mun Gi Jung , Duk Hyun Son
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2021-0063450 20210517
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/68

Abstract:
Disclosed is a ring carrier used for transferring a ring member. The ring carrier includes a body having a plate shape, and a guide part protruding from an upper surface of the body to face an inner periphery of the ring member, and an alignment hole used when the ring carrier is aligned is formed in the body to pass through the body.
Public/Granted literature
- US20220367155A1 RING CARRIER AND SUBSTRATE TREATING SYSTEM Public/Granted day:2022-11-17
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