Invention Grant
- Patent Title: Low loss transversely-excited film bulk acoustic resonators and filters
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Application No.: US17855711Application Date: 2022-06-30
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Publication No.: US12341490B2Publication Date: 2025-06-24
- Inventor: Bryant Garcia , Greg Dyer
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/02 ; H03H9/13 ; H03H9/17

Abstract:
An acoustic resonator device includes a portion of a piezoelectric plate is a diaphragm spanning a cavity in a substrate. A conductor pattern on a surface of the piezoelectric plate includes an interdigital transducer (IDT) with a first busbar, a second busbar, and a plurality of interleaved fingers extending alternately from the first and second busbars, first and second reflector elements proximate and parallel to a first finger of the interleaved fingers, and third and fourth reflector element proximate and parallel to a last finger of the interleaved fingers. Overlapping portions of the interleaved fingers and the first to fourth reflector elements are on the diaphragm. pr1 is a center-to-center distance of the first and second reflector elements and a center-to-center distance of the third and fourth reflector elements, p is a pitch of the interleaved fingers, and 1.1p≤pr1≤1.5p.
Public/Granted literature
- US20220352873A1 LOW LOSS TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS Public/Granted day:2022-11-03
Information query
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