Loaded resonators for adjusting frequency response of acoustic wave resonators
Abstract:
The device includes an acoustic wave filter element, and a first resonator. The acoustic wave filter element includes interdigitated input electrodes and output electrodes located on a top surface of a piezoelectric layer and a counter-electrode on a bottom surface of the piezoelectric layer. The acoustic wave filter element provides a response with a sideband at a sideband frequency range. The first resonator includes a first resonator electrode on the top surface of the piezoelectric layer and a first resonator counter-electrode on the bottom surface of the piezoelectric layer. The first resonator has a first notch in resonator impedance at a first frequency. The first resonance frequency is tuned to fall within the sideband frequency range to suppress the sideband by depositing a first mass load on top of the first resonator electrode to reduce the first resonance frequency, or partly removing the first resonator electrode to increase the first resonance frequency.
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