Invention Application
- Patent Title: SPIN COATING METHOD AND COATING APPARATUS
- Patent Title (中): 旋涂方法和涂装设备
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Application No.: US09508520Application Date: 2000-03-27
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Publication No.: US20020037366A1Publication Date: 2002-03-28
- Inventor: HIROYUKI ARIOKA
- Priority: JP9-279650 19970927
- Main IPC: B05D003/12
- IPC: B05D003/12 ; B05D001/02 ; B05C011/02 ; B05C013/00 ; B05C005/00

Abstract:
There are provided a spin coating method and an apparatus for forming a thin film having a uniform thickness on a substrate at a low cost in a process for manufacturing semiconductors, optical disks and the like. A coating solution is dropped onto the surface of a substrate (2) to be coated, mounted on a horizontal turn table (3) through a discharge nozzle (4) and the substrate is turned to form a thin film. After the coating solution is dropped through the nozzle, a stand-by nozzle tip (4a) is soaked and held in a nozzle soaking solution (10) having a composition near or equivalent to that of the coating solution. The crystal deposition of the solute is suppressed. Inter alia, the present invention is useful when a solution containing a solute having high crystallizability is coated.
Public/Granted literature
- US06592936B2 Spin coating method and coating apparatus Public/Granted day:2003-07-15
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