Invention Application
- Patent Title: Stable electrical contact for silicon carbide devices
- Patent Title (中): 碳化硅器件稳定的电气接触
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Application No.: US09940064Application Date: 2001-08-27
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Publication No.: US20020068488A1Publication Date: 2002-06-06
- Inventor: Harry L. Tuller , Marlene A. Spears , Richard Mlcak
- Applicant: Boston MicroSystems, Inc.
- Applicant Address: MA Woburn
- Assignee: Boston MicroSystems, Inc.
- Current Assignee: Boston MicroSystems, Inc.
- Current Assignee Address: MA Woburn
- Main IPC: H01L029/06
- IPC: H01L029/06 ; H01R004/28
Abstract:
An electrical contact for a silicon carbide component comprises a material that is in thermodynamic equilibrium with silicon carbide. The electrical contact is typically formed of Ti3SiC2 that is deposited on the silicon carbide component.
Public/Granted literature
- US06544674B2 Stable electrical contact for silicon carbide devices Public/Granted day:2003-04-08
Information query
