Invention Application
- Patent Title: BUMP FABRICATION PROCESS
- Patent Title (中): BUMP制造工艺
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Application No.: US10248688Application Date: 2003-02-10
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Publication No.: US20030166331A1Publication Date: 2003-09-04
- Inventor: Ho-Ming Tong , Chun-Chi Lee , Jen-Kuang Fang , Min-Lung Huang , Jau-Shoung Chen , Ching-Huei Su , Chao-Fu Weng , Yung-Chi Lee , Yu-Chen Chou , Tsung-Hua Wu , Su Tao
- Priority: TW91103533 20020227
- Main IPC: H01L021/44
- IPC: H01L021/44

Abstract:
A bump fabrication process for forming a bump over a wafer having a plurality of bonding pads thereon is provided. A patterned solder mask layer having a plurality of openings that exposes the respective bonding pads is formed over a wafer. The area of the opening in a the cross-sectional area through a the bottom-section as well as through a the top-section of the opening is smaller than the area of the opening in a the cross-sectional area through a the mid-section of the opening. Solder material is deposited into the opening and then a reflow process is conducted fusing the solder material together to form a spherical bump inside the opening. Finally, the solder mask layer is removed. In addition, a pre-formed bump may form on the bonding pad of the wafer prior to forming the patterned solder mask layer over the wafer having at leastwith an opening that exposes the pre-formed bump. Solder material is deposited into the openings and then a reflow process is conducted fusing the solder material and the pre-formed bump together to form a spherical bump. The pre-formed bump and the solder material may be fabricated using different constituents.
Public/Granted literature
- US06967153B2 Bump fabrication process Public/Granted day:2005-11-22
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