Invention Application
- Patent Title: Holding device for disk-shaped objects
- Patent Title (中): 用于盘形物体的保持装置
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Application No.: US10913891Application Date: 2004-08-06
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Publication No.: US20050031497A1Publication Date: 2005-02-10
- Inventor: Sonke Siebert , Michael Schweiger , Andreas Lang
- Applicant: Sonke Siebert , Michael Schweiger , Andreas Lang
- Priority: DE10336205.3-33 20030807
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B01L9/00 ; B23Q3/00 ; B25B11/00 ; H01L21/68 ; H01L21/687

Abstract:
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.
Public/Granted literature
- US07284760B2 Holding device for disk-shaped objects Public/Granted day:2007-10-23
Information query
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