Invention Application
US20050031497A1 Holding device for disk-shaped objects 有权
用于盘形物体的保持装置

Holding device for disk-shaped objects
Abstract:
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.
Public/Granted literature
Information query
Patent Agency Ranking
0/0