Invention Application
- Patent Title: Micromechanical component and method for producing same
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US10492896Application Date: 2002-09-05
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Publication No.: US20050052092A1Publication Date: 2005-03-10
- Inventor: Franz Laermer
- Applicant: Franz Laermer
- Priority: DE10152254.1 20011020
- International Application: PCT/DE02/03283 WO 20020905
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; G01C19/5712 ; G01P15/00 ; H01L41/08

Abstract:
A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second regions, which are connected by a third region of a second material, and at least one of the regions is part of a movable structure, which is suspended over the substrate.
Public/Granted literature
- US07312553B2 Micromechanical component and method for producing same Public/Granted day:2007-12-25
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