Invention Application
US20050052092A1 Micromechanical component and method for producing same 有权
微机械部件及其制造方法

  • Patent Title: Micromechanical component and method for producing same
  • Patent Title (中): 微机械部件及其制造方法
  • Application No.: US10492896
    Application Date: 2002-09-05
  • Publication No.: US20050052092A1
    Publication Date: 2005-03-10
  • Inventor: Franz Laermer
  • Applicant: Franz Laermer
  • Priority: DE10152254.1 20011020
  • International Application: PCT/DE02/03283 WO 20020905
  • Main IPC: B81B3/00
  • IPC: B81B3/00 B81C1/00 G01C19/5712 G01P15/00 H01L41/08
Micromechanical component and method for producing same
Abstract:
A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second regions, which are connected by a third region of a second material, and at least one of the regions is part of a movable structure, which is suspended over the substrate.
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