Invention Application
- Patent Title: Scanning optical system
- Patent Title (中): 扫描光学系统
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Application No.: US10677587Application Date: 2003-10-02
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Publication No.: US20050073675A1Publication Date: 2005-04-07
- Inventor: William Lo
- Applicant: William Lo
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G01N21/956 ; G01N21/00
Abstract:
A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.
Public/Granted literature
- US07042647B2 Scanning optical system Public/Granted day:2006-05-09
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