Invention Application
- Patent Title: Electrical connections in microelectromechanical devices
- Patent Title (中): 微机电装置中的电气连接
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Application No.: US11181079Application Date: 2005-07-13
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Publication No.: US20050250362A1Publication Date: 2005-11-10
- Inventor: Jonathan Doan , Satyadev Patel , Robert Duboc
- Applicant: Jonathan Doan , Satyadev Patel , Robert Duboc
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01R13/15

Abstract:
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Public/Granted literature
- US07436573B2 Electrical connections in microelectromechanical devices Public/Granted day:2008-10-14
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