Invention Application
US20050250362A1 Electrical connections in microelectromechanical devices 有权
微机电装置中的电气连接

Electrical connections in microelectromechanical devices
Abstract:
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
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