Invention Application
- Patent Title: Surface inspection apparatus, polarization illuminating device and light-receiving device
- Patent Title (中): 表面检查装置,偏光照明装置和光接收装置
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Application No.: US11150385Application Date: 2005-06-13
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Publication No.: US20050280806A1Publication Date: 2005-12-22
- Inventor: Takeo Oomori , Hideo Hirose , Yasuharu Nakajima , Kenzo Chiaki , Tatsumi Satou
- Applicant: Takeo Oomori , Hideo Hirose , Yasuharu Nakajima , Kenzo Chiaki , Tatsumi Satou
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2004-178880 20040616; JP2004-324688 20041109; JP2005-084290 20050323; JP2005-139068 20050511
- Main IPC: G01N21/21
- IPC: G01N21/21 ; G01N21/88 ; G01N21/95 ; G01N21/956

Abstract:
A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.
Public/Granted literature
- US07307725B2 Surface inspection apparatus, polarization illuminating device and light-receiving device Public/Granted day:2007-12-11
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