Invention Application
- Patent Title: Method for producing thin semiconductor films by deposition from solution
- Patent Title (中): 通过溶液沉积生产薄半导体膜的方法
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Application No.: US10949604Application Date: 2004-09-24
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Publication No.: US20060024960A1Publication Date: 2006-02-02
- Inventor: Jeffrey Meth
- Applicant: Jeffrey Meth
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/44

Abstract:
A method is described for producing thin semiconductor films on a substrate by contacting a substrate with a solution containing a metal salt, a source of a Group VIa element, and chelating agent, and a noble metal in its elemental form. The resulting semiconductor films are useful for electronic and photovoltaic applications.
Public/Granted literature
- US07163835B2 Method for producing thin semiconductor films by deposition from solution Public/Granted day:2007-01-16
Information query
IPC分类: