Invention Application
- Patent Title: Vibration-insensitive interferometer
- Patent Title (中): 振动不敏感干涉仪
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Application No.: US11207327Application Date: 2005-08-19
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Publication No.: US20060039007A1Publication Date: 2006-02-23
- Inventor: Seung Kim , Hagyong Kihm , Jung Park
- Applicant: Seung Kim , Hagyong Kihm , Jung Park
- Priority: KR10-2004-0065700 20040820; KR10-2005-0063110 20050713
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from the measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift devise that enables to obtain four interferograms of different amounts of phase shift simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant level of vibration.
Public/Granted literature
- US07405830B2 Vibration-insensitive interferometer Public/Granted day:2008-07-29
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