Invention Application
US20060092398A1 Method and apparatus for variable polarization control in a lithography system 有权
光刻系统中可变偏振控制的方法和装置

  • Patent Title: Method and apparatus for variable polarization control in a lithography system
  • Patent Title (中): 光刻系统中可变偏振控制的方法和装置
  • Application No.: US10978367
    Application Date: 2004-11-02
  • Publication No.: US20060092398A1
    Publication Date: 2006-05-04
  • Inventor: Matthew McCarthy
  • Applicant: Matthew McCarthy
  • Applicant Address: NL DR Veldhoven
  • Assignee: ASML Holding N.V.
  • Current Assignee: ASML Holding N.V.
  • Current Assignee Address: NL DR Veldhoven
  • Main IPC: G03B27/72
  • IPC: G03B27/72
Method and apparatus for variable polarization control in a lithography system
Abstract:
A polarization control device for a lithography system selectively polarizes light in horizontal, vertical and/or circular orientations. A pair of relatively rotatable quarter-wave plates move to provide the desired polarization. When the quarter-wave plates are at a relative angle of 45 degrees, the polarization is circular. When the quarter-wave plates are both at zero or 45 degrees, the resulting polarization is vertical or horizontal. The polarization is selected based on the orientation of an image to be projected. Horizontal polarization is preferably used for images with a strong horizontal orientation, and vertical polarization is selected for images with a strong vertical orientation. Circular orientation is selected when the image has no strong horizontal or vertical orientation.
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