Invention Application
US20070035814A1 Euv projection lens with mirrors made from material with differing signs for the rise in temperature dependence of the thermal expansion coefficient around the zero transition temperature
有权
Euv投影透镜，具有由具有不同符号的材料制成的反射镜，用于在零转变温度附近的热膨胀系数的温度依赖性升高
- Patent Title: Euv projection lens with mirrors made from material with differing signs for the rise in temperature dependence of the thermal expansion coefficient around the zero transition temperature
- Patent Title (中): Euv投影透镜，具有由具有不同符号的材料制成的反射镜，用于在零转变温度附近的热膨胀系数的温度依赖性升高
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Application No.: US10577163Application Date: 2003-09-27
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Publication No.: US20070035814A1Publication Date: 2007-02-15
- Inventor: Udo Dinger , Frank Eisert , Stefan Koehler , Andreas Ochse , Johannes Zellner , Martin Lowisch , Timo Laufer
- Applicant: Udo Dinger , Frank Eisert , Stefan Koehler , Andreas Ochse , Johannes Zellner , Martin Lowisch , Timo Laufer
- International Application: PCT/EP03/10761 WO 20030927
- Main IPC: G06K7/10
- IPC: G06K7/10
Abstract:
A projection objective 1 for short wavelengths, in particular for wavelengths λ
Public/Granted literature
- US07557902B2 Projection objective Public/Granted day:2009-07-07
Information query
