Invention Application
US20070046313A1 Mounting Spring Elements on Semiconductor Devices, and Wafer-Level Testing Methodology
审中-公开
在半导体器件上安装弹簧元件和晶圆级测试方法
- Patent Title: Mounting Spring Elements on Semiconductor Devices, and Wafer-Level Testing Methodology
- Patent Title (中): 在半导体器件上安装弹簧元件和晶圆级测试方法
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Application No.: US11552856Application Date: 2006-10-25
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Publication No.: US20070046313A1Publication Date: 2007-03-01
- Inventor: Benjamin Eldridge , Gary Grube , Igor Khandros , Ga tan Mathieu
- Applicant: Benjamin Eldridge , Gary Grube , Igor Khandros , Ga tan Mathieu
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
Resilient contact structures are mounted directly to bond pads on semiconductor dies, prior to the dies being singulated (separated) from a semiconductor wafer. This enables the semiconductor dies to be exercised (e.g., tested and/or burned-in) by connecting to the semiconductor dies with a circuit board or the like having a plurality of terminals disposed on a surface thereof. Subsequently, the semiconductor dies may be singulated from the semiconductor wafer, whereupon the same resilient contact structures can be used to effect interconnections between the semiconductor dies and other electronic components (such as wiring substrates, semiconductor packages, etc.). Using the all-metallic composite interconnection elements of the present invention as the resilient contact structures, burn-in can be performed at temperatures of at least 150° C., and can be completed in less than 60 minutes.
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