Invention Application
US20070069149A1 Combined aperture holder, beam blanker and vacuum feed through for electron beam, ion beam charged particle devices
审中-公开
组合式光阑支架，光束消隐器和真空馈电用于电子束，离子束带电粒子装置
- Patent Title: Combined aperture holder, beam blanker and vacuum feed through for electron beam, ion beam charged particle devices
- Patent Title (中): 组合式光阑支架，光束消隐器和真空馈电用于电子束，离子束带电粒子装置
-
Application No.: US11238570Application Date: 2005-09-29
-
Publication No.: US20070069149A1Publication Date: 2007-03-29
- Inventor: Earl Weltmer
- Applicant: Earl Weltmer
- Main IPC: H01J3/38
- IPC: H01J3/38
Abstract:
A combined aperture, aperture holder, vacuum feed through and beam blanker for a beam of charged particles fits into an existing aperture in a charged particle beam device such as a scanning electron microscope or an ion beam chamber.
Information query
