Invention Application
- Patent Title: COLLECTOR FOR AN ILLUMINATION SYSTEM
- Patent Title (中): 收集器用于照明系统
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Application No.: US11781010Application Date: 2007-07-20
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Publication No.: US20080018876A1Publication Date: 2008-01-24
- Inventor: Ralf Stuetzle , Udo Dinger
- Applicant: Ralf Stuetzle , Udo Dinger
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT AG
- Current Assignee: CARL ZEISS SMT AG
- Current Assignee Address: DE Oberkochen
- Priority: DE102006034059.0 20060720; DE102007004237.1 20070123
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B19/00
Abstract:
Collectors with mirror shells arranged inside each other, illumination systems equipped with such collectors, projection exposure apparatuses equipped with such illumination systems, methods of manufacturing microelectronic components with such projection exposure apparatuses, and related systems, components and methods are disclosed.
Public/Granted literature
- US07910900B2 Collector for an illumination system Public/Granted day:2011-03-22
Information query
