Invention Application
US20080022778A1 Microfabricated pressure and shear stress sensors 有权
微型压力和剪切应力传感器

Microfabricated pressure and shear stress sensors
Abstract:
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
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