Invention Application
US20080029700A1 FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME
有权
现场发射电子枪和使用该电子枪的电子束应用装置
- Patent Title: FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME
- Patent Title (中): 现场发射电子枪和使用该电子枪的电子束应用装置
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Application No.: US11831989Application Date: 2007-08-01
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Publication No.: US20080029700A1Publication Date: 2008-02-07
- Inventor: TADASHI FUJIEDA , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
- Applicant: TADASHI FUJIEDA , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
- Priority: JP2006-210454 20060802
- Main IPC: H01J37/073
- IPC: H01J37/073 ; H01J37/26 ; H01J37/30

Abstract:
The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
Public/Granted literature
- US07732764B2 Field emission electron gun and electron beam applied device using the same Public/Granted day:2010-06-08
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