Invention Application
- Patent Title: ORGANIC VAPOR JET PRINTING WITH CHILLER PLATE
- Patent Title (中): 有机蒸汽喷射机用冷冻板打印
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Application No.: US12870125Application Date: 2010-08-27
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Publication No.: US20110097495A1Publication Date: 2011-04-28
- Inventor: Paul E. Burrows , Siddharth Harikrishna Mohan
- Applicant: Paul E. Burrows , Siddharth Harikrishna Mohan
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Main IPC: C23C16/458
- IPC: C23C16/458 ; B05B7/00 ; C23C16/00

Abstract:
A device is provided. The device includes a nozzle, a source of carrier gas and a source of organic molecules in fluid communication with the nozzle. The device also includes an active cooling system disposed adjacent to the nozzle. Preferably, the device also includes a chamber, wherein the nozzle, and the active cooling system are disposed within the chamber. A substrate holder may also be disposed within the chamber, adapted to support a substrate beneath the nozzle, movable relative to the nozzle. Preferably, a substrate is held by the substrate holder, the substrate disposed at a distance of 0.1 to 10 mm from the active cooling system. Preferably, the device also includes a heating system attached to the nozzle. The points at which the heating system are attached to the nozzle preferably includes at least one point that is zero to 5 mm from the tip of the nozzle.
Information query
IPC分类: