Invention Application
- Patent Title: SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE
- Patent Title (中): 传感器元件用于测量差压
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Application No.: US13191118Application Date: 2011-07-26
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Publication No.: US20120024074A1Publication Date: 2012-02-02
- Inventor: Sven ZINOBER , Remigius Has
- Applicant: Sven ZINOBER , Remigius Has
- Priority: DE102010038534.4 20100728
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.
Public/Granted literature
- US08511168B2 Sensor element for capacitively measuring differential pressure Public/Granted day:2013-08-20
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