Invention Application
US20120024074A1 SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE 有权
传感器元件用于测量差压

  • Patent Title: SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE
  • Patent Title (中): 传感器元件用于测量差压
  • Application No.: US13191118
    Application Date: 2011-07-26
  • Publication No.: US20120024074A1
    Publication Date: 2012-02-02
  • Inventor: Sven ZINOBERRemigius Has
  • Applicant: Sven ZINOBERRemigius Has
  • Priority: DE102010038534.4 20100728
  • Main IPC: G01L9/12
  • IPC: G01L9/12
SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE
Abstract:
A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.
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