Invention Application
- Patent Title: GIGASONIC BRUSH FOR CLEANING SURFACES
- Patent Title (中): 用于清洁表面的GIGASONIC BRUSH
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Application No.: US12847621Application Date: 2010-07-30
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Publication No.: US20120024313A1Publication Date: 2012-02-02
- Inventor: Abbas Rastegar
- Applicant: Abbas Rastegar
- Assignee: SEMATECH, INC.
- Current Assignee: SEMATECH, INC.
- Main IPC: B08B3/12
- IPC: B08B3/12

Abstract:
An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.
Public/Granted literature
- US08539969B2 Gigasonic brush for cleaning surfaces Public/Granted day:2013-09-24
Information query
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