Invention Application
US20120025859A1 COMBINED PROBE HEAD FOR A VERTICAL PROBE CARD AND METHOD FOR ASSEMBLING AND ALIGNING THE COMBINED PROBE HEAD THEREOF 有权
用于垂直探针卡的组合探头和用于组装和对准组合探头的方法

  • Patent Title: COMBINED PROBE HEAD FOR A VERTICAL PROBE CARD AND METHOD FOR ASSEMBLING AND ALIGNING THE COMBINED PROBE HEAD THEREOF
  • Patent Title (中): 用于垂直探针卡的组合探头和用于组装和对准组合探头的方法
  • Application No.: US13189572
    Application Date: 2011-07-25
  • Publication No.: US20120025859A1
    Publication Date: 2012-02-02
  • Inventor: Chao-Ching HUANGWen-Chi ChenChiu-Chu Chang
  • Applicant: Chao-Ching HUANGWen-Chi ChenChiu-Chu Chang
  • Priority: TW099124636 20100727
  • Main IPC: G01R1/067
  • IPC: G01R1/067
COMBINED PROBE HEAD FOR A VERTICAL PROBE CARD AND METHOD FOR ASSEMBLING AND ALIGNING THE COMBINED PROBE HEAD THEREOF
Abstract:
A combined probe head being disposed in a space transformer of a vertical probe card is provided, in which the combined probe head is used for differentiating or segmenting a layout area of the probes in the vertical probe card. The combined probe head may include a locating plate and sub-probe heads. The locating plate may include fixed portions. Each sub-probe head may include corresponding sub-dies and probes inserted between the sub-dies, and each sub-probe head is assembled and fixed in the corresponding fixed portion. Therefore, the layout area of the probes in the vertical probe card can be respectively differentiated or segmented from the sub-probe heads in order to avoid mutual interference under repair process. In addition, a related method for assembling and aligning the above mentioned combined probe head is provided.
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