Invention Application
US20120034394A1 DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
有权
分布式多区域等离子体源系统，方法和装置
- Patent Title: DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
- Patent Title (中): 分布式多区域等离子体源系统，方法和装置
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Application No.: US12852352Application Date: 2010-08-06
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Publication No.: US20120034394A1Publication Date: 2012-02-09
- Inventor: Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
- Applicant: Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
- Main IPC: H05H1/02
- IPC: H05H1/02
Abstract:
A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.
Public/Granted literature
- US09155181B2 Distributed multi-zone plasma source systems, methods and apparatus Public/Granted day:2015-10-06
Information query
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