Invention Application
- Patent Title: METHOD AND APPARATUS FOR MICROCONTACT PRINTING OF MEMS
- Patent Title (中): MEMS微型打印的方法与装置
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Application No.: US13248901Application Date: 2011-09-29
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Publication No.: US20120069488A1Publication Date: 2012-03-22
- Inventor: Vladimir Bulovic , Corinne Evelyn Packard , Jennifer Jong-Hua Yu , Apoorva Murarka , LeeAnn Kim
- Applicant: Vladimir Bulovic , Corinne Evelyn Packard , Jennifer Jong-Hua Yu , Apoorva Murarka , LeeAnn Kim
- Applicant Address: US MA Cambridge
- Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- Current Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- Current Assignee Address: US MA Cambridge
- Priority: USPCT/US09/067801 20091214
- Main IPC: H01G4/06
- IPC: H01G4/06

Abstract:
The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.
Public/Granted literature
- US08601658B2 Method for forming a MEMS capacitor array Public/Granted day:2013-12-10
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