Invention Application
- Patent Title: ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
- Patent Title (中): 电子设备及制造电子设备的方法
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Application No.: US13286494Application Date: 2011-11-01
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Publication No.: US20120104593A1Publication Date: 2012-05-03
- Inventor: Yoko KANEMOTO , Akira SATO , Shogo INABA
- Applicant: Yoko KANEMOTO , Akira SATO , Shogo INABA
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-245974 20101102
- Main IPC: H01L23/06
- IPC: H01L23/06 ; H01L21/52

Abstract:
An electronic device according to the invention includes: a substrate; an MEMS structure formed above the substrate; and a covering structure defining a cavity in which the MEMS structure is arranged, wherein the covering structure has a first covering layer covering from above the cavity and having a through-hole in communication with the cavity and a second covering layer formed above the first covering layer and closing the through-hole, the first covering layer has a first region located above at least the MEMS structure and a second region located around the first region, the first covering layer is thinner in the first region than in the second region, and a distance between the substrate and the first covering layer in the first region is longer than a distance between the substrate and the first covering layer in the second region.
Public/Granted literature
- US08796845B2 Electronic device covered by multiple layers and method for manufacturing electronic device Public/Granted day:2014-08-05
Information query
IPC分类: