Invention Application
- Patent Title: ZONE PLATE
- Patent Title (中): 区域板块
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Application No.: US13347320Application Date: 2012-01-10
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Publication No.: US20120105961A1Publication Date: 2012-05-03
- Inventor: Wouter Anthon Soer , Maarten Marinus Johannes Wilhelmus Van Herpen
- Applicant: Wouter Anthon Soer , Maarten Marinus Johannes Wilhelmus Van Herpen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G02B27/44
- IPC: G02B27/44
Abstract:
A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.
Public/Granted literature
- US08836917B2 Zone plate Public/Granted day:2014-09-16
Information query
