Invention Application
US20120183719A1 BLANK OF TITANIUM-DOPED GLASS WITH A HIGH SILICA CONTENT FOR A MIRROR SUBSTRATE FOR USE IN EUV LITHOGRAPHY AND METHOD FOR THE PRODUCTION THEREOF 有权
具有高二氧化硅含量的钛白粉玻璃用于在EUV光刻中使用的镜面基板及其生产方法

  • Patent Title: BLANK OF TITANIUM-DOPED GLASS WITH A HIGH SILICA CONTENT FOR A MIRROR SUBSTRATE FOR USE IN EUV LITHOGRAPHY AND METHOD FOR THE PRODUCTION THEREOF
  • Patent Title (中): 具有高二氧化硅含量的钛白粉玻璃用于在EUV光刻中使用的镜面基板及其生产方法
  • Application No.: US13499352
    Application Date: 2010-09-28
  • Publication No.: US20120183719A1
    Publication Date: 2012-07-19
  • Inventor: Bodo Kuehn
  • Applicant: Bodo Kuehn
  • Applicant Address: DE Hanau
  • Assignee: HERAEUS QUARZGLAS GMBH & CO. KG
  • Current Assignee: HERAEUS QUARZGLAS GMBH & CO. KG
  • Current Assignee Address: DE Hanau
  • Priority: DE102009043680.4 20090930
  • International Application: PCT/EP2010/064317 WO 20100928
  • Main IPC: B32B17/00
  • IPC: B32B17/00 C03B23/13
BLANK OF TITANIUM-DOPED GLASS WITH A HIGH SILICA CONTENT FOR A MIRROR SUBSTRATE FOR USE IN EUV LITHOGRAPHY AND METHOD FOR THE PRODUCTION THEREOF
Abstract:
On the basis of a known method for producing a blank of titanium-doped glass with a high silica content (glass) for a mirror substrate for use in EUV lithography which has a surface region that has an outer contour, is intended to be provided with a reflective coating and is specified as a highly loaded zone when the mirror substrate is used as intended, in order to provide a blank which can be produced at low cost and nevertheless meets high requirements with respect to homogeneity and freedom from blisters and striae, a procedure which comprises the following method steps is proposed: (a) producing a front body of titanium-doped high-quality glass with dimensions more than large enough to enclose the outer contour, (b) producing a cylindrical supporting body from titanium-doped glass, (c) bonding the front body and the supporting body to form a composite body, and (d) working the composite body to form the mirror substrate blank, wherein the step of producing the front body comprises a homogenizing process involving twisting a starting body obtained in the form of a strand by flame hydrolysis of a silicon-containing compound to form a front body blank, and the supporting body is formed as a monolithic glass block with less homogeneity than the front body.
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