Invention Application
- Patent Title: PACKAGE STRUCTURE HAVING MICRO-ELECTROMECHANICAL ELEMENT
- Patent Title (中): 具有微电子元件的包装结构
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Application No.: US13492220Application Date: 2012-06-08
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Publication No.: US20120241937A1Publication Date: 2012-09-27
- Inventor: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Chun-An Huang , Chih-Ming Huang
- Applicant: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Chun-An Huang , Chih-Ming Huang
- Applicant Address: TW Taichung
- Assignee: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- Current Assignee: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- Current Assignee Address: TW Taichung
- Priority: TW098145250 20091228
- Main IPC: H01L23/498
- IPC: H01L23/498

Abstract:
Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.
Public/Granted literature
- US08564115B2 Package structure having micro-electromechanical element Public/Granted day:2013-10-22
Information query
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