Invention Application
- Patent Title: SENSOR DEVICE
- Patent Title (中): 传感器设备
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Application No.: US13603145Application Date: 2012-09-04
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Publication No.: US20120325657A1Publication Date: 2012-12-27
- Inventor: Takeki Yamamoto , Masaya Nakatani , Hiroshi Ushio , Yoshiki Yamada , Yusuke Nakano
- Applicant: Takeki Yamamoto , Masaya Nakatani , Hiroshi Ushio , Yoshiki Yamada , Yusuke Nakano
- Applicant Address: JP Osaka
- Assignee: PANASONIC CORPORATION
- Current Assignee: PANASONIC CORPORATION
- Current Assignee Address: JP Osaka
- Priority: JP2010-078444 20100330
- Main IPC: G01N27/28
- IPC: G01N27/28

Abstract:
A sensor device includes a substrate and a sensor chip held on the substrate. The substrate includes a flow channel. The sensor chip includes a plate. The plate includes a first surface and a second surface opposite to the first surface. A plurality of through holes each penetrates through the first surface and the second surface. A direction of a line segment connecting centers of any two adjacent through holes among the plurality of through holes is neither parallel nor perpendicular to the center line of the flow channel.
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