Invention Application
- Patent Title: STRUCTURE MADE OF GETTER MATERIAL HERMETICALLY PROTECTED DURING MANUFACTURING
- Patent Title (中): 在制造过程中保护材料的结构
-
Application No.: US13530513Application Date: 2012-06-22
-
Publication No.: US20120328779A1Publication Date: 2012-12-27
- Inventor: Stéphane Caplet , Xavier Baillin
- Applicant: Stéphane Caplet , Xavier Baillin
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique Et Aux Ene Alt
- Current Assignee: Commissariat A L'Energie Atomique Et Aux Ene Alt
- Current Assignee Address: FR Paris
- Priority: FR1155564 20110623
- Main IPC: B05D5/00
- IPC: B05D5/00
Abstract:
Process for making a device comprising at least the following steps: produce a getter structure comprising at least one portion of getter material permeable to gas covered by at least one protective layer hermetic to gas; hermetic encapsulation of the getter structure in a cavity; production of at least one local opening passing through the protective layer and forming an access to the portion of getter material permeable to gas.
Information query
