Invention Application
- Patent Title: ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Patent Title (中): 用于半导体加工室的吸收反射器
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Application No.: US14258410Application Date: 2014-04-22
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Publication No.: US20140376898A1Publication Date: 2014-12-25
- Inventor: Kin Pong Lo , Paul Brillhart , Balasubramanian Ramachandran , Satheesh Kuppurao , Daniel Redfield , Joseph M. Ranish , James Francis Mack , Kailash Kiran Patalay , Michael Olsen , Eddie Feigel , Richard Halpin , Brett Vetorino
- Applicant: Applied Materials, Inc.
- Main IPC: H05B3/00
- IPC: H05B3/00 ; H01L21/67

Abstract:
Embodiments of the disclosure generally relate to a reflector for use in a thermal processing chamber. In one embodiment, the thermal processing chamber generally includes an upper dome, a lower dome opposing the upper dome, the upper dome and the lower dome defining an internal volume of the processing chamber, a substrate support disposed within the internal volume, and a reflector positioned above and proximate to the upper dome, wherein the reflector has a heat absorptive coating layer deposited on a side of the reflector facing the substrate support.
Public/Granted literature
- US09832816B2 Absorbing reflector for semiconductor processing chamber Public/Granted day:2017-11-28
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