Invention Application
- Patent Title: MICROELECTROMECHANICAL SYSTEM WITH A MICRO-SCALE SPRING SUSPENSION SYSTEM AND METHODS FOR MAKING THE SAME
- Patent Title (中): 具有微尺度弹簧悬挂系统的微电子机电系统及其制造方法
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Application No.: US13970209Application Date: 2013-08-19
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Publication No.: US20150048903A1Publication Date: 2015-02-19
- Inventor: JOHN E. ROGERS
- Applicant: HARRIS CORPORATION
- Applicant Address: US FL Melbourne
- Assignee: HARRIS CORPORATION
- Current Assignee: HARRIS CORPORATION
- Current Assignee Address: US FL Melbourne
- Main IPC: H03H9/46
- IPC: H03H9/46

Abstract:
Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The MEMS devices comprise a substrate (200) and a MEMS filter device (100) mechanically suspended above a major surface of the substrate. A first gas gap (202) exists between the major surface of the substrate and the MEMS filter device. An isolation platform (500) is provided to absorb vibrations from an external environment prior to reaching the MEMS filter device. In this regard, the isolation platform comprises: a frame structure (510) framing a periphery of the MEMS filter device; and at least one resilient component (512-518) coupled between the frame structure and the MEMS filter device. The frame structure is mechanically connected to the substrate. Electronic circuitry is connected to the MEMS filter device via a resilient interconnection (204, 206) that is movable in at least one direction of the vibrations.
Public/Granted literature
- US09136822B2 Microelectromechanical system with a micro-scale spring suspension system and methods for making the same Public/Granted day:2015-09-15
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