Invention Application
US20150323452A1 DYNAMIC MEASUREMENT OF MATERIAL PROPERTIES USING TERAHERTZ RADIATION WITH REAL-TIME THICKNESS MEASUREMENT FOR PROCESS CONTROL
审中-公开
使用TERAHERTZ辐射与实时厚度测量进行过程控制的材料特性的动态测量
- Patent Title: DYNAMIC MEASUREMENT OF MATERIAL PROPERTIES USING TERAHERTZ RADIATION WITH REAL-TIME THICKNESS MEASUREMENT FOR PROCESS CONTROL
- Patent Title (中): 使用TERAHERTZ辐射与实时厚度测量进行过程控制的材料特性的动态测量
-
Application No.: US14334529Application Date: 2014-07-17
-
Publication No.: US20150323452A1Publication Date: 2015-11-12
- Inventor: Edward King , David Heaps , Mark Sullivan , Richard McKay , Eiji Kato
- Applicant: Advantest Corporation
- Main IPC: G01N21/3586
- IPC: G01N21/3586 ; G01N21/3563 ; G01B11/06 ; G01N33/15

Abstract:
A method of determining material properties for an object under test is disclosed. The method comprises determining a thickness at a point on the object under test in a non-invasive manner. It also comprises obtaining a terahertz measurement by passing terahertz radiation through the object under test using a terahertz emitter and detecting the terahertz radiation using a terahertz detector. Finally, it comprises determining an optical property at the point on the object under test using a measurement value from the terahertz emitter and the terahertz detector and a measured value for the thickness at the point.
Information query
IPC分类: