Invention Application
- Patent Title: HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE
- Patent Title (中): HELMHOLTZ线圈辅助PECVD碳源
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Application No.: US14448639Application Date: 2014-07-31
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Publication No.: US20160035546A1Publication Date: 2016-02-04
- Inventor: Christopher Loren Platt , Zhaohui Fan , Samuel Lewis Tanaka , Chun Wai Joseph Tong , Thomas Larson Greenberg , Xiaoding Ma
- Applicant: SEAGATE TECHNOLOGY LLC
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35

Abstract:
The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.
Public/Granted literature
- US10151025B2 Helmholtz coil assisted PECVD carbon source Public/Granted day:2018-12-11
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