Invention Application
US20160035546A1 HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE 审中-公开
HELMHOLTZ线圈辅助PECVD碳源

HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE
Abstract:
The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.
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