Invention Application
US20160091344A1 CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS 审中-公开
电容式传感器及其制造方法以及获取装置的对象信息

  • Patent Title: CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS
  • Patent Title (中): 电容式传感器及其制造方法以及获取装置的对象信息
  • Application No.: US14890718
    Application Date: 2014-05-29
  • Publication No.: US20160091344A1
    Publication Date: 2016-03-31
  • Inventor: Yoshihiro HasegawaToshio Tomiyoshi
  • Applicant: CANON KABUSHIKI KAISHA
  • Applicant Address: JP Ohta-ku, Tokyo
  • Assignee: CANON KABUSHIKI KAISHA
  • Current Assignee: CANON KABUSHIKI KAISHA
  • Current Assignee Address: JP Ohta-ku, Tokyo
  • Priority: JP2013-120666 20130607
  • International Application: PCT/JP2014/064895 WO 20140529
  • Main IPC: G01D5/24
  • IPC: G01D5/24 G01N29/24
CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS
Abstract:
Provided is a capacitive transducer with improved reliability of sealing. The capacitive transducer includes a cell and a sealing portion. The cell includes a first electrode and a vibrating membrane having a second electrode formed to oppose the first electrode through intermediation of a cavity. An etching opening portion is formed to form the cavity by sacrifice layer etching. The sealing portion seals the etching opening portion. A gap at a periphery of the sealing portion has a height smaller than that of the cavity. In a manufacturing method therefor, in a step of forming a sacrifice layer for forming the cavity and the gap communicating to the cavity via an etching flow path, a height of the sacrifice layer in a region that is to become the gap is set to be smaller than that of the sacrifice layer in a region that is to become the cavity.
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