Invention Application
US20160091344A1 CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS
审中-公开
电容式传感器及其制造方法以及获取装置的对象信息
- Patent Title: CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS
- Patent Title (中): 电容式传感器及其制造方法以及获取装置的对象信息
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Application No.: US14890718Application Date: 2014-05-29
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Publication No.: US20160091344A1Publication Date: 2016-03-31
- Inventor: Yoshihiro Hasegawa , Toshio Tomiyoshi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Ohta-ku, Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Ohta-ku, Tokyo
- Priority: JP2013-120666 20130607
- International Application: PCT/JP2014/064895 WO 20140529
- Main IPC: G01D5/24
- IPC: G01D5/24 ; G01N29/24

Abstract:
Provided is a capacitive transducer with improved reliability of sealing. The capacitive transducer includes a cell and a sealing portion. The cell includes a first electrode and a vibrating membrane having a second electrode formed to oppose the first electrode through intermediation of a cavity. An etching opening portion is formed to form the cavity by sacrifice layer etching. The sealing portion seals the etching opening portion. A gap at a periphery of the sealing portion has a height smaller than that of the cavity. In a manufacturing method therefor, in a step of forming a sacrifice layer for forming the cavity and the gap communicating to the cavity via an etching flow path, a height of the sacrifice layer in a region that is to become the gap is set to be smaller than that of the sacrifice layer in a region that is to become the cavity.
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