Invention Application
- Patent Title: GLASS PALLET FOR SPUTTERING SYSTEMS
- Patent Title (中): 玻璃胶囊用于喷射系统
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Application No.: US14893502Application Date: 2014-06-09
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Publication No.: US20160111260A1Publication Date: 2016-04-21
- Inventor: Trevor Frank , Robert T. Rozbicki , Jason Satern
- Applicant: VIEW, INC.
- Applicant Address: US CA Milpitas
- Assignee: View, Inc.
- Current Assignee: View, Inc.
- Current Assignee Address: US CA Milpitas
- International Application: PCT/US2014/041569 WO 20140609
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.
Public/Granted literature
- US11133158B2 Glass pallet for sputtering systems Public/Granted day:2021-09-28
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