Invention Application
US20160121452A1 POLISHING APPARATUS AND POLISHING METHOD 审中-公开
抛光装置和抛光方法

  • Patent Title: POLISHING APPARATUS AND POLISHING METHOD
  • Patent Title (中): 抛光装置和抛光方法
  • Application No.: US14925063
    Application Date: 2015-10-28
  • Publication No.: US20160121452A1
    Publication Date: 2016-05-05
  • Inventor: Taro TAKAHASHI
  • Applicant: EBARA CORPORATION
  • Priority: JP2014-223293 20141031; JP2015-168088 20150827
  • Main IPC: B24B37/015
  • IPC: B24B37/015
POLISHING APPARATUS AND POLISHING METHOD
Abstract:
A polishing apparatus capable of polishing a substrate while accurately measuring a temperature at a desired measuring point near a surface of the substrate is disclosed. The polishing apparatus includes: a polishing pad having a polishing surface for polishing a substrate; a polishing table supporting the polishing pad; a table motor configured to rotate the polishing table; a polishing head configured to press a surface of the substrate against the polishing surface of the polishing pad; a polishing liquid supply nozzle configured to supply a polishing liquid onto the polishing surface of the polishing pad; and a temperature sensor mounted to the polishing table. The temperature sensor is located so as to move across the surface of the substrate each time the polishing table makes one revolution.
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