Invention Application
- Patent Title: POLISHING APPARATUS AND POLISHING METHOD
- Patent Title (中): 抛光装置和抛光方法
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Application No.: US14925063Application Date: 2015-10-28
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Publication No.: US20160121452A1Publication Date: 2016-05-05
- Inventor: Taro TAKAHASHI
- Applicant: EBARA CORPORATION
- Priority: JP2014-223293 20141031; JP2015-168088 20150827
- Main IPC: B24B37/015
- IPC: B24B37/015

Abstract:
A polishing apparatus capable of polishing a substrate while accurately measuring a temperature at a desired measuring point near a surface of the substrate is disclosed. The polishing apparatus includes: a polishing pad having a polishing surface for polishing a substrate; a polishing table supporting the polishing pad; a table motor configured to rotate the polishing table; a polishing head configured to press a surface of the substrate against the polishing surface of the polishing pad; a polishing liquid supply nozzle configured to supply a polishing liquid onto the polishing surface of the polishing pad; and a temperature sensor mounted to the polishing table. The temperature sensor is located so as to move across the surface of the substrate each time the polishing table makes one revolution.
Information query