Invention Application
- Patent Title: Electron Microscope
- Patent Title (中): 电子显微镜
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Application No.: US14912549Application Date: 2014-03-14
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Publication No.: US20160203943A1Publication Date: 2016-07-14
- Inventor: Toshiyuki OYAGI , Takafumi YOTSUJI
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Priority: JP2013-199129 20130926
- International Application: PCT/JP2014/056823 WO 20140314
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/285

Abstract:
Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas atmosphere. The electron microscope is provided with a gas inlet device for emitting gas onto a sample, and a gas control device controlling the amount of gas emitted by the gas inlet device so that, during the gas emission by the gas inlet device, the degree of vacuum within the space where the detector (49-51, 55) is installed is continuously maintained to less than a set value.
Public/Granted literature
- US09754763B2 Electron microscope Public/Granted day:2017-09-05
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