Invention Application
- Patent Title: Method and Apparatus for Infrared Scattering Scanning Near-field Optical Microscopy with High Speed Point Spectroscopy
- Patent Title (中): 红外散射扫描近场光学显微镜与高速点光谱法的方法和装置
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Application No.: US14634859Application Date: 2015-03-01
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Publication No.: US20170003316A1Publication Date: 2017-01-05
- Inventor: Honghua Yang , Kevin Kjoller , Sam Berweger , Craig Prater
- Applicant: ANASYS INSTRUMENTS
- Applicant Address: US CA Santa Barbara
- Assignee: ANASYS INSTRUMENTS
- Current Assignee: ANASYS INSTRUMENTS
- Current Assignee Address: US CA Santa Barbara
- Main IPC: G01Q60/18
- IPC: G01Q60/18 ; G01N21/47

Abstract:
This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.
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